{"id":415,"date":"2021-02-11T13:34:02","date_gmt":"2021-02-11T04:34:02","guid":{"rendered":"https:\/\/c-mng.cwh.hokudai.ac.jp\/lifm.eng\/Root\/?p=415"},"modified":"2021-02-11T13:39:01","modified_gmt":"2021-02-11T04:39:01","slug":"kka","status":"publish","type":"post","link":"https:\/\/c-mng.cwh.hokudai.ac.jp\/lifm.eng\/Root\/journal\/kka.html","title":{"rendered":"\u96fb\u5b50\u9855\u5fae\u93e1\u3092\u7528\u3044\u305f\u5c40\u6240\u9818\u57df\u306e\u5149\u5b66\u7279\u6027\u6e2c\u5b9a\u624b\u6cd5\u306e\u63d0\u6848"},"content":{"rendered":"
\n

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\u3000\u30a8\u30ec\u30af\u30c8\u30ed\u30cb\u30af\u30b9\u6a5f\u5668\u306e\u3055\u3089\u306a\u308b\u5c0f\u578b\u5316\u30fb\u9ad8\u6027\u80fd\u5316\u306b\u5411\u3051\uff0c\u30c8\u30e9\u30f3\u30b8\u30b9\u30bf\u306a\u3069\u306e\u96fb\u5b50\u30c7\u30d0\u30a4\u30b9\u306e\u5fae\u5c0f\u5316\u304c\u9032\u3093\u3067\u3044\u307e\u3059\uff0e\u3053\u306e\u3068\u304d\uff0cMOSFET\u306e\u9178\u5316\u7269\u7d76\u7e01\u4f53\u306e\u8584\u819c\u5316\u306b\u4f34\u3044\u30ea\u30fc\u30af\u96fb\u6d41\u304c\u767a\u751f\u3057\u307e\u3059\uff0e(\u4e0b\u56f3) \u30ea\u30fc\u30af\u96fb\u6d41\u3092\u9632\u3050\u305f\u3081\uff0c\u3088\u308a\u8a98\u96fb\u7387\u306e\u9ad8\u3044\u9178\u5316\u7269(high-k\u6750\u6599)\u304c\u7528\u3044\u3089\u308c\u3066\u3044\u307e\u3059\u304c\uff0c\u30c7\u30d0\u30a4\u30b9\u4e2d\u306b\u7d44\u307f\u8fbc\u3093\u3060\u5834\u5408\u306e\u8a98\u96fb\u7387\u306e\u8a55\u4fa1\u304c\u91cd\u8981\u3068\u306a\u3063\u3066\u3044\u307e\u3059\uff0e<\/p>\n

\"\"<\/p>\n

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<\/p>\n

\t\t\t\t\"\"

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\t\t\t\t\"\"

\u56f32\u3000(\u5de6)\u5149\u3068(\u53f3)\u96fb\u5b50\u304c\u6750\u6599\u306b\u5165\u5c04\u3057\u305f\u5834\u5408\u306e\u96fb\u5b50\u52b1\u8d77\u306e\u6982\u5ff5\u56f3<\/center><\/p>\n
\n
\n

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\u3000\u8a73\u7d30\u306fN. Sakaguchi et al. Microscopy 65 (2016) 415<\/a>\u3092\u3054\u89a7\u304f\u3060\u3055\u3044\uff0e<\/p>\n

\u3000\u96fb\u5b50\u7dda\u3092\u7528\u3044\u3066\u5149\u5b66\u7279\u6027\u3092\u6e2c\u5b9a\u3059\u308b\u5834\u5408\uff0c\u5149\u304c\u5165\u5c04\u3057\u305f\u5834\u5408\u306b\u306f\u8d77\u3053\u3089\u306a\u3044\u9045\u5ef6\u52b9\u679c\u3068\u547c\u3070\u308c\u308b\u73fe\u8c61\u304c\u8d77\u3053\u308a\uff0c\u6b63\u78ba\u306a\u5149\u5b66\u7279\u6027\u6e2c\u5b9a\u304c\u884c\u3048\u306a\u3044\u3068\u3044\u3046\u554f\u984c\u70b9\u304c\u3042\u308a\u307e\u3059\uff0e(\u56f33) \u6563\u4e71\u89d2\u304c\u5c0f\u3055\u3044\u5834\u5408\u306b\uff5e10 eV\u306e\u9818\u57df\u306b\u9045\u5ef6\u52b9\u679c\u304c\u8868\u308c\u308b\u3053\u3068\u304c\u5206\u304b\u308a\u307e\u3059\uff0e\u307e\u305f\uff0c\u5c48\u6298\u7387\u306e\u9ad8\u3044\u6750\u6599\u4e2d\u3067\u306f\u96fb\u5b50\u7dda\u306e\u901f\u3055\u304c\u5149\u901f\u3092\u8d85\u3048\u3066\u3057\u307e\u3046\u3053\u3068\u304c\u3042\u308a\uff0c\u3053\u306e\u3088\u3046\u306a\u5834\u5408\u306b\u3082\u9855\u8457\u306b\u73fe\u308c\u307e\u3059\uff0e<\/p>\n

\"\"

\u56f33\u3000(\u5de6)\u9045\u5ef6\u52b9\u679c\u3092\u8003\u616e\u3057\u306a\u3044\u5834\u5408\u3068(\u53f3)\u9045\u5ef6\u52b9\u679c\u3092\u8003\u616e\u3057\u305f\u5834\u5408\u306e\u30a8\u30cd\u30eb\u30ae\u30fc\u640d\u5931\u30b9\u30da\u30af\u30c8\u30eb.
\n\t\t\t\tN. Sakaguchi et al., Improving the measurement of dielectric function by TEM-EELS: avoiding the retardation effect, Microscopy 65 (2016) 415, Oxford University Press.<\/a><\/center>\n<\/div>\n<\/div>\n

\u25bc\u89e3\u6c7a\u7b561\u3000\u9045\u5ef6\u52b9\u679c\u304c\u3042\u307e\u308a\u8d77\u304d\u306a\u3044\u9818\u57df\u307e\u3067\u96fb\u5b50\u7dda\u3092\u9045\u304f\u3059\u308b<\/h3>\n

\u3000\u8a73\u7d30\u306fN. Sakaguchi et al., Ultramicroscopy, 169 (2016) 37.<\/a>\u3092\u3054\u89a7\u304f\u3060\u3055\u3044\uff0e<\/p>\n

\u3000\u96fb\u5b50\u306e\u901f\u3055\u304c\u5149\u901f\u3092\u8d85\u3048\u305f\u5834\u5408\u306b\u9045\u5ef6\u52b9\u679c\u304c\u9855\u8457\u3068\u306a\u308a\u307e\u3059\uff0e\u305d\u3053\u3067\uff0c\u96fb\u5b50\u306e\u901f\u3055(\u52a0\u901f\u96fb\u5727)\u3092\u5149\u901f\u4ee5\u4e0b\u306b\u306a\u308b\u307e\u3067\u4f4e\u4e0b\u3055\u305b\u308b\u3068\uff0c\u9045\u5ef6\u52b9\u679c\u306e\u5f71\u97ff\u3092\u5c0f\u3055\u304f\u3059\u308b\u3053\u3068\u304c\u3067\u304d\u307e\u3059\uff0e<\/p>\n

\u25b6\ufe0e\u03b1-Al2<\/sub>O3<\/sub>\u306e\u5149\u5b66\u7279\u6027\u3092\u6e2c\u5b9a\u3057\u305f\u4f8b(\u56f34)<\/strong><\/p>\n

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\n\u30fb\u5c48\u6298\u7387\u306e\u5927\u304d\u306a\u6750\u6599\u306b\u3064\u3044\u3066\u306f\u5927\u304d\u304f\u52a0\u901f\u96fb\u5727\u3092\u4e0b\u3052\u306a\u3051\u308c\u3070\u306a\u3089\u306a\u3044
\n\u30fb\u52a0\u901f\u96fb\u5727\u3092\u4e0b\u3052\u308b\u3068\u7a7a\u9593\u5206\u89e3\u80fd\u304c\u4f4e\u4e0b\u3059\u308b<\/p>\n

\"\"

\u56f34\u3000\u03b1-Al2<\/sub>O3<\/sub>\u306b\u3064\u3044\u3066\uff0c\u96fb\u5b50\u7dda\u3092\u7528\u3044\u3066\u5149\u5b66\u7279\u6027\u6e2c\u5b9a\u3092\u884c\u3063\u305f\u7d50\u679c\uff0eRef.[34]\u306f\u5149\u3092\u7528\u3044\u305f\u5149\u5b66\u7279\u6027\u6e2c\u5b9a\u7d50\u679c\uff0e(E.T. Arakawa and M.W. Williams, J. Phys. Chem. Solids 29 (1968) 735.)
\n\t\t\t\tN. Sakaguchi et al., Ultramicroscopy, 169 (2016) 37.<\/a><\/center><\/p>\n
\n
\n

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\u3000\u8a73\u7d30\u306fN. Sakaguchi et al., Ultramicroscopy, 169 (2016) 37.<\/a>\u3092\u3054\u89a7\u304f\u3060\u3055\u3044\uff0e<\/p>\n

\u3000\u9045\u5ef6\u52b9\u679c\u306f\u6563\u4e71\u89d2\u304c\u5c0f\u3055\u3044\u9818\u57df\u306b\u73fe\u308c\u307e\u3059\uff0e\u305d\u3053\u3067\u56f35\u306e\u3088\u3046\u306b\uff12\u7a2e\u985e\u306e\u7d5e\u308a\u3092\u7528\u3044\u305f\u6e2c\u5b9a\u7d50\u679c\u3092\u5dee\u3057\u5f15\u304f\u3053\u3068\u3067\uff0c\u4f4e\u6563\u4e71\u89d2\u9818\u57df\u3092\u53d6\u308a\u9664\u304d\u307e\u3059\uff0e<\/p>\n

\"\"

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\n\u3000\u03b1-Al2<\/sub>O3<\/sub>\u306f\u4fa1\u96fb\u5b50\u5e2f\u306e\u30d0\u30f3\u30c9\u304c\u6bd4\u8f03\u7684\u30d5\u30e9\u30c3\u30c8\u3067\u3042\u308b\u305f\u3081\uff0c\u904b\u52d5\u91cf\u5909\u5316\u306e\u5f71\u97ff\u304c\u5c0f\u3055\u304f\uff0c\u6b63\u78ba\u306a\u5149\u5b66\u7279\u6027\u304c\u884c\u3048\u305f\u3068\u8003\u3048\u3089\u308c\u308b\uff0e<\/p>\n

\"\"

\u56f36\u3000\u03b1-Al2<\/sub>O3<\/sub>\u306b\u3064\u3044\u3066\uff0c\u4f4e\u89d2\u6563\u4e71\u9664\u53bb\u6cd5\u306b\u3088\u308a\u5149\u5b66\u7279\u6027\u6e2c\u5b9a\u3092\u884c\u3063\u305f\u7d50\u679c\uff0eRef.[34]\u306f\u5149\u3092\u7528\u3044\u305f\u5149\u5b66\u7279\u6027\u6e2c\u5b9a\u7d50\u679c\uff0e(E.T. Arakawa and M.W. Williams, J. Phys. Chem. Solids 29 (1968) 735.)
\n\t\t\t\tN. Sakaguchi et al., Ultramicroscopy, 169 (2016) 37.<\/a><\/center><\/p>\n<\/div>\n<\/div>\n","protected":false},"excerpt":{"rendered":"

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